| Molecular Formula | Cl2H2Si |
| Molar Mass | 101.01 |
| Density | 1,22 g/cm3 |
| Melting Point | −122 °C(lit.) |
| Boling Point | 8.3 °C(lit.) |
| Flash Point | -37°C |
| Water Solubility | decomposes |
| Vapor Presure | 1254 mm Hg ( 20 °C) |
| Vapor Density | 3.5 (vs air) |
| Appearance | Morphological colorless gas |
| Stability | Stable. Extremely flammable; note very wide explosion limits. Reacts violently with water, alcohols, strong oxidizing agents, bases. |
| Physical and Chemical Properties | The chemical properties are colorless. Flammable. Toxic corrosive gas with pungent odor. Melting point -122 ℃. Boiling point 8.2 ℃. Relative density of gas (air = 1)4.599; Relative density of liquid d4}-122>. 1.42. The critical temperature is 176.3 ℃. Steam pressure (20 ℃, absolute pressure) 0.15 Mpa. The specific volume (20 ℃,1.0133 × 105Pa)239 mI/g. The explosion limit in the air is 1.3% ~ 98%. It reacts violently with water. Hydrolyzed in humid air to generate hydrochloric acid mist. It's highly corrosive. |
| Use | Applications for semiconductor manufacturing, in particular epitaxial processes as a silicon source. For epitaxial growth of polycrystalline silicon and chemical vapor deposition of silicon dioxide and silicon nitride in the electronics industry |
| Risk Codes | R12 - Extremely Flammable R14 - Reacts violently with water R23 - Toxic by inhalation R34 - Causes burns |
| Safety Description | S26 - In case of contact with eyes, rinse immediately with plenty of water and seek medical advice. S36/37/39 - Wear suitable protective clothing, gloves and eye/face protection. S45 - In case of accident or if you feel unwell, seek medical advice immediately (show the label whenever possible.) |
| UN IDs | UN 2189 2.3 |
| WGK Germany | 1 |
| RTECS | VV3050000 |
| FLUKA BRAND F CODES | 4.5 |
| TSCA | Yes |
| Hazard Class | 2.3 |
| Raw Materials | Silicon Trichlorosilane |
| explosion limit value (explosive limit) | 99% |
| hydrolysis sensitivity | 9: reacts extremely rapidly with atmospheric moisture - may be pyrophoric - glove box or sealed system required |
| EPA chemical information | Dichlorosilane (4109-96-0) |
| DOT Classification | 2.3 Hazard Zone B (Gas poisonous by inhalation) |
Toxicity
Inhalation of the human body will hydrolyze to produce hydrochloric acid, stimulate the respiratory system, cause cough, lung edema. Sucking human dichlorodihydrogen silicon gas for a longer time will cause suffocation and death. Splashing on the skin can cause necrosis and the ulcer will not heal for a long time.
production personnel should wear airtight work clothes, anti-virus masks, airtight glasses, latex gloves and other labor protection products to prevent direct contact with respiratory organs, eyes and skin. The production equipment should be airtight and the workshop should be well ventilated. Take a shower after work.
production method
The silicon powder and hydrogen chloride are reacted in an appropriate proportion to generate dichlorodihydrogen silicon, which is distilled to separate trichlorodihydrogen silicon, and the obtained dichlorodihydrogen silicon is refined to obtain electronic grade high purity dichlorodihydrogen silicon finished product. Its
Si 2HCl→SiH2C12